Automatic regeneration system and regeneration method for low-temperature pump

The low-temperature pump automatic regeneration system comprises a low-temperature pump, the rough pumping inlet end of the low-temperature pump is connected with an exhaust pipeline, the exhaust pipeline is connected with a rough pumping pipeline and an air outlet pipe through a tee joint, a pre-va...

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Bibliographische Detailangaben
Hauptverfasser: XU CHENGMING, WANG XINWEN, YE FA, PENG HONGKUN, LU YIBIN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The low-temperature pump automatic regeneration system comprises a low-temperature pump, the rough pumping inlet end of the low-temperature pump is connected with an exhaust pipeline, the exhaust pipeline is connected with a rough pumping pipeline and an air outlet pipe through a tee joint, a pre-valve and a rough pumping valve are installed on the rough pumping pipeline, and the rough pumping pipeline is connected with a rough pumping pump; the gas inlet end of the low-temperature pump is connected with the nitrogen leading-in valve through a gas inlet pipeline; a gas inlet of the low-temperature pump is connected with the exhaust end of a vacuum cavity of the vacuum treatment device, a heater is arranged on the low-temperature pump, a film vacuum gauge is installed on the low-temperature pump, and the control ends of the pre-valve, the rough pumping valve, the exhaust valve, the nitrogen leading-in valve and the heater are all connected with a controller through wires. And the signal output end of the film