Semiconductor integrated chip and manufacturing method thereof

The invention provides a semiconductor integrated chip and a manufacturing method thereof, the semiconductor integrated chip comprises a substrate, the substrate is provided with a cellular area and a terminal area, the cellular area is provided with an IGBT tube to be detected and a detection IGBT...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHEN YI, ZHAO ERKUN, SHANG SONGCHUAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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