Semiconductor integrated chip and manufacturing method thereof

The invention provides a semiconductor integrated chip and a manufacturing method thereof, the semiconductor integrated chip comprises a substrate, the substrate is provided with a cellular area and a terminal area, the cellular area is provided with an IGBT tube to be detected and a detection IGBT tube, and the terminal area is provided with a diode, a resistor and an MOS tube; the diode and the resistor are arranged in the terminal area, so that the overcurrent protection circuit is integrated on the semiconductor integrated chip in a monolithic mode, the chip integration degree can be improved, the occupied area of a PCB is reduced, the short-circuit protection function (namely the overcurrent protection function) is achieved, the saturation current of the to-be-detected IGBT tube during short circuit is reduced, and the reliability of the to-be-detected IGBT tube is improved. And the thermal damage of the to-be-detected IGBT tube caused by overhigh current is avoided, namely, the risk of breakdown of the