Slit coating equipment

The invention discloses slit coating equipment. The slit coating equipment comprises an upper chamber and a lower chamber which are communicated with each other, an FFU laminar flow air supply unit for supplying air is arranged at the top of the upper chamber; an exhaust system is connected outside the lower cavity; an air floating material table assembly used for bearing a substrate is arranged in the upper cavity, the air floating material table assembly is assembled on a guide rail assembly arranged at the bottom of the upper cavity, a tool bit assembly is assembled above the air floating material table assembly, and a feeding assembly is arranged at the upper end of the tool bit assembly; an FFU laminar flow air supply unit for supplying air is arranged at the top of the upper chamber, so that the cleanliness of a working area is ensured; and an exhaust system is connected outside the lower cavity and is used for exhausting harmful gas, so that the health of workers is guaranteed. 本发明公开了一种狭缝涂布设备，包括相连通的上腔室