Simulation display system for reaction in magnetron sputtering cooling cavity

The invention relates to the technical field of reaction simulation display, in particular to a reaction simulation display system in a magnetron sputtering cooling cavity, which comprises a server, a data acquisition unit, an external presentation feedback unit, a self-checking operation unit, a co...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LI ZHIXING, WANG ZHEKUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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