Surface acoustic wave resonance device and method for forming surface acoustic wave resonance device

A surface acoustic wave resonance device and a forming method thereof, the surface acoustic wave resonance device comprising: a piezoelectric layer comprising a first side and a second side opposite to each other; the interdigital transducer is positioned on the first side of the piezoelectric layer...

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Bibliographische Detailangaben
Hauptverfasser: JIN JIAN, GUO YONG, XU LIULONG, LU YUANYUAN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A surface acoustic wave resonance device and a forming method thereof, the surface acoustic wave resonance device comprising: a piezoelectric layer comprising a first side and a second side opposite to each other; the interdigital transducer is positioned on the first side of the piezoelectric layer; and the metal layer is positioned on the second side of the piezoelectric layer. The performance of the surface acoustic wave resonance device is improved. 一种声表面波谐振装置及声表面波谐振装置的形成方法,声表面波谐振装置包括:压电层,所述压电层包括相对的第一侧和第二侧;位于压电层第一侧的叉指换能器;位于压电层第二侧的金属层。所述声表面波谐振装置的性能得到提升。