Preparation device system and preparation method of monosilane

The invention provides a preparation device system and a preparation method of monosilane. The preparation device system comprises a mixing device, a first micro-channel reaction device, a sodium aluminum hydride washing device, a tubular reaction device, a silane transfer device, a second micro-cha...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG WEIJIA, HAO JINLONG, MENG QINGSEN, YANG ZHENJIAN, ZANG LIJIE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM,CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THERARE-EARTH METALS COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL THEIR RELEVANT APPARATUS TRANSPORTING
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