Preparation device system and preparation method of monosilane

The invention provides a preparation device system and a preparation method of monosilane. The preparation device system comprises a mixing device, a first micro-channel reaction device, a sodium aluminum hydride washing device, a tubular reaction device, a silane transfer device, a second micro-channel reaction device and a product receiving device which are connected in sequence. By using the micro-channel reaction device, the mass transfer process is enhanced, the reaction conditions are milder, the pressure required by the reaction is properly reduced, the reaction temperature can be properly increased, and meanwhile, the reaction safety is also improved. Moreover, the dosage of the catalyst in the preparation method is greatly reduced, the production cost is controlled, and the application of dangerous chemicals is also reduced. 本发明提供了一种甲硅烷的制备装置系统及制备方法，所述制备装置系统包括依次连接的混料装置、第一微通道反应装置、四氢铝钠洗涤装置、管式反应装置、硅烷中转装置、第二微通道反应装置以及产品接收装置。本发明通过微通道反应装置的使用，强化了传质过程，使反应条件更加温和，反应所需压力适当降低，并能够使反应温度适当提高，同时也提高了反应的安全性。而且，本发明制备方法中催