Tank system and method thereof

A method of processing a plurality of substrates, the method comprising immersing the plurality of substrates in a bath solution contained in a bath chamber; generating bubbles in the bath solution; light from the light source is projected to the groove chamber; generating light sensor data by captu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MARUMOTO HIROSHI, ESTRELLA JOEL, SIMS IHSAN, ROTONDARO ANTONIO LUIS PACHECO, CARCASI MICHAEL, HOOGE JOSHUA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!