Tank system and method thereof

A method of processing a plurality of substrates, the method comprising immersing the plurality of substrates in a bath solution contained in a bath chamber; generating bubbles in the bath solution; light from the light source is projected to the groove chamber; generating light sensor data by capturing light emitted from the cell upon interaction with the bubbles with a light sensor; and converting the light sensor data into metrics of the bath liquid. 一种加工多个衬底的方法，该方法包括将多个衬底浸入包含在槽室中的槽液中；在该槽液中产生气泡；将来自光源的光投射向该槽室；通过用光传感器捕获在与这些气泡相互作用后从该槽室发出的光来生成光传感器数据；并将光传感器数据转换成该槽液的度量。