Hydrogen sensor and preparation method thereof

The invention discloses a hydrogen sensor and a preparation method thereof, and the preparation method comprises the following steps: sequentially preparing a dielectric layer and a hydrogen sensitive resistor on the front surface of an SOI chip, and carrying out wet etching on the hydrogen sensitive resistor to complete the preparation of the hydrogen sensor. According to the preparation method, the hydrogen sensitive resistor is subjected to wet etching, so that the roughness of the hydrogen sensitive resistor can be increased, the hydrogen absorption area of the hydrogen sensitive resistor can be remarkably increased on the premise that the resistance value of the resistor is not greatly changed, and the sensitivity and the response speed of the sensor can be improved at the same time; according to the present invention, the stable working temperature can be ensured, the stability of the hydrogen sensor is excellent, the power consumption of the hydrogen sensor can be substantially reduced, the processing