Large-capacitance eight-mass MEMS gyroscope

The invention discloses a large-capacitance eight-mass MEMS gyroscope which comprises a fixed anchor point, an external fixed anchor point, a sensitive mass block, a sensitive mass coupling beam, an external decoupling mass and an internal decoupling mass. The eight external fixed anchor points, the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HUANG SHENHU, SU YAN, ZHOU YI, JIANG BO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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