Large-capacitance eight-mass MEMS gyroscope
The invention discloses a large-capacitance eight-mass MEMS gyroscope which comprises a fixed anchor point, an external fixed anchor point, a sensitive mass block, a sensitive mass coupling beam, an external decoupling mass and an internal decoupling mass. The eight external fixed anchor points, the...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a large-capacitance eight-mass MEMS gyroscope which comprises a fixed anchor point, an external fixed anchor point, a sensitive mass block, a sensitive mass coupling beam, an external decoupling mass and an internal decoupling mass. The eight external fixed anchor points, the eight external decoupling masses, the eight sensitive mass blocks and the eight internal decoupling masses are respectively enclosed to form an equilateral octagon; the other eight external fixed anchor points are positioned between the eight external decoupling masses and the eight sensitive mass blocks; the eight sensitive mass blocks are connected through sensitive mass coupling beams; the internal decoupling mass is connected with the central fixed anchor point through the double U-shaped beams and is connected with the central fixed anchor point through the circumferential double folding beams; the sensitive mass block is connected with the circumferential double-folding beam through the radial double-folding |
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