Isostatic pressing graphite boat connecting structure for third-generation semiconductor

The invention relates to the technical field of graphite boats, in particular to an isostatic pressing graphite boat connecting structure for a third-generation semiconductor, which comprises a heat conducting plate and a shell frame mounted on the peripheral side of the heat conducting plate, a plu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LYU ZUNHUA, FENG YUCHI, FENG YIYU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of graphite boats, in particular to an isostatic pressing graphite boat connecting structure for a third-generation semiconductor, which comprises a heat conducting plate and a shell frame mounted on the peripheral side of the heat conducting plate, a plurality of mounting holes used for connecting a heat dissipation substrate are formed in the bottom of the shell frame, and two clamping blocks are arranged at the two ends of the shell frame respectively. The clamping block is installed at the working end of the driving unit, heat insulation cavities are formed in the two sides of the shell frame in the length direction, and handles are installed in the middles of the outer sides of the heat insulation cavities in a sliding mode. The handle and the shell frame are separated in the heat transfer process of the heat conducting plate, and the handle is prevented from being heated, so that after heat dissipation of the graphite boat is finished, a worker can immediatel