Chip surface defect detection method of compressed multi-head self-attention neural network

The invention belongs to the field of defect detection and image processing, and relates to a chip surface defect detection method based on a compressed multi-head self-attention neural network, which comprises the following steps of: photographing and collecting images on the surface of a chip by u...

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Bibliographische Detailangaben
Hauptverfasser: CHU JIE, TIAN XINRU, CAI JUEPING, WEN KAILIN, LI TIANHONG, KONG LIANG, ZHANG CHENGKAI
Format: Patent
Sprache:chi ; eng
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