Evaluation method for anisotropic characteristics of semiconductor resistivity and Seebeck coefficient
The invention provides a method for evaluating anisotropic characteristics of semiconductor resistivity and Seebeck coefficient. The method for evaluating the anisotropic characteristics of the semiconductor resistivity and the Seebeck coefficient comprises the following steps: acquiring the resista...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a method for evaluating anisotropic characteristics of semiconductor resistivity and Seebeck coefficient. The method for evaluating the anisotropic characteristics of the semiconductor resistivity and the Seebeck coefficient comprises the following steps: acquiring the resistance of a to-be-tested sample in a first direction; respectively determining a first contact point and a second contact point of the first probe and the second probe with the to-be-detected sample in the first direction; determining a mathematical relational expression according to the position of the first contact point and the position of the second contact point; determining the resistivity of the to-be-measured sample according to the mathematical relationship and the resistance; obtaining a temperature difference between the first contact point and the second contact point; determining a Seebeck coefficient of the to-be-detected sample according to the temperature difference; acquiring the resistivity and Seebe |
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