COMPOSITION FOR REMOVING PHOTORESIST FROM SUBSTRATES AND USE THEREOF

The disclosed and claimed subject matter relates to a photoresist stripper solution comprising (i) one or more inorganic bases; (ii) two or more organic solvents; (iii) one or more corrosion inhibitors, and may optionally comprise (iv) one or more secondary solvents. 所公开和要求保护的主题涉及光致抗蚀剂剥离剂溶液,其包含(i)一种...

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Hauptverfasser: CAO YUANMEI, WANG LILI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The disclosed and claimed subject matter relates to a photoresist stripper solution comprising (i) one or more inorganic bases; (ii) two or more organic solvents; (iii) one or more corrosion inhibitors, and may optionally comprise (iv) one or more secondary solvents. 所公开和要求保护的主题涉及光致抗蚀剂剥离剂溶液,其包含(i)一种或多种无机碱;(ii)两种或更多种有机溶剂;(iii)一种或多种腐蚀抑制剂,并且可以任选地包含(iv)一种或多种二级溶剂。