Multimodal field negative hydrogen ion source extraction structure

The invention provides a multimodal field negative hydrogen ion source lead-out structure. The lead-out structure is arranged in a lead-out area of ion source electrons and negative hydrogen ions. The extraction structure is sequentially provided with a discharge chamber, a plasma electrode at the o...

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Bibliographische Detailangaben
Hauptverfasser: WEN JIAMEI, XIE ZONGTAI, LYU YINLONG, CUI TAO, LI MING, QIN WEITAO, WANG YU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a multimodal field negative hydrogen ion source lead-out structure. The lead-out structure is arranged in a lead-out area of ion source electrons and negative hydrogen ions. The extraction structure is sequentially provided with a discharge chamber, a plasma electrode at the outlet of the discharge chamber, a suction electrode, a ground electrode and an insulation device along the beam extraction direction, the leading-out structure is further provided with an air channel, the air channel is used for ion source air inlet in a mode of permeating between a plasma electrode and a discharge chamber, the air inlet mode enables hydrogen to be diffused from the leading-out opening to the filament direction, and the yield of negative hydrogen can be improved. The plasma electrode and the suction electrode are cooled indirectly, and the insulation device between the suction electrode and the ground electrode is protected through the first check ring and the second check ring. The extraction stru