Double-station multi-axis air flotation motion system for wafer 3D packaging

The invention belongs to the technical field of wafer packaging equipment, and particularly relates to a double-station multi-shaft air floatation motion system for wafer 3D packaging, a marble platform is fixedly mounted above a rack, four supports are symmetrically arranged above the marble platform, an air floatation marble seat is fixedly mounted above the four supports, and a plurality of air floatation air cylinders are symmetrically arranged above the air floatation marble seat. The bottom surface of the upper platform and the air floating guide mechanism are matched with the air floating surface structure of the air floating marble seat to form an air floating guide rail, the bottom surface of the lower platform and the air floating blocks on the side surfaces of the lower platform are matched with the air floating surface structure of the air floating marble seat to form an air floating guide rail, and the optical imaging systems on the left and right sides of the lower platform are symmetrically mou