Substrate support structure and substrate processing apparatus

The invention provides a substrate supporting structure and a substrate processing apparatus capable of preventing a component from falling off. A substrate support structure provided with a plurality of substrate support pins each having a substrate support member that comes into contact with a sub...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: YASUTOMO ATSUSHI, ITO TAKESHI, WAKABAYASHI TAKANORI
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention provides a substrate supporting structure and a substrate processing apparatus capable of preventing a component from falling off. A substrate support structure provided with a plurality of substrate support pins each having a substrate support member that comes into contact with a substrate and a lever member connected to the substrate support member, the substrate support member having: a head portion having a substrate contact surface that comes into contact with the substrate and a first contact surface that comes into contact with the lever member; and an insertion part provided on the first contact surface side, the insertion part having: a male thread part having a male thread formed on the outer peripheral surface; and a lever part which is formed closer to the first contact surface than the male thread part and has a diameter smaller than that of the male thread part, the lever member having: a second contact surface which contacts the first contact surface of the substrate support memb