Composite film suitable for atomic layer deposition process and preparation method thereof

The invention provides a composite film suitable for an atomic layer deposition process and a preparation method of the composite film. The composite film sequentially comprises a base film, an organic coating and an inorganic coating layer from bottom to top, wherein an inorganic matter is deposite...

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Bibliographische Detailangaben
Hauptverfasser:	CHEN LANLAN, REN DONGXUE, REN YUEQING, SUN XIAOJIE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ADHESIVES AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F,C08G CHEMICAL PAINT OR INK REMOVERS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING COMPOSITIONS, e.g. PAINTS, VARNISHES ORLACQUERS COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS BASED THEREON COMPOSITIONS OF MACROMOLECULAR COMPOUNDS CORRECTING FLUIDS DIFFUSION TREATMENT OF METALLIC MATERIAL DYES FILLING PASTES GENERAL PROCESSES OF COMPOUNDING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INKS METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS ORGANIC MACROMOLECULAR COMPOUNDS PAINTS PASTES OR SOLIDS FOR COLOURING OR PRINTING POLISHES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR PREPARATION OR CHEMICAL WORKING-UP USE OF MATERIALS THEREFOR WOODSTAINS WORKING-UP
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Beschreibung
Zusammenfassung:	The invention provides a composite film suitable for an atomic layer deposition process and a preparation method of the composite film. The composite film sequentially comprises a base film, an organic coating and an inorganic coating layer from bottom to top, wherein an inorganic matter is deposited on an organic coating by adopting an atomic layer deposition process to form an inorganic coating layer, and the organic coating is selected from one or more of a polyester coating, a polyurethane coating or an acrylate coating. The method comprises the following steps: (1) coating a raw material for preparing an organic coating on the surface of a substrate film, and curing and forming the organic coating through a drying or ultraviolet curing process; and (2) depositing an inorganic coating layer on the surface of the organic coating by adopting a plasma enhanced atomic layer deposition process to obtain the final composite film. The organic coating in the composite film provided by the invention is not easy to