POSITION DETECTOR AND LINEAR TRANSPORT DEVICE
The position detector (5) is provided with: magnet parts (12) for position detection, each of which is provided on a plurality of supports on which a movable element is mounted; and a position detection unit (22) provided on a transport rail on which the fixture is mounted, the position detection ma...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | The position detector (5) is provided with: magnet parts (12) for position detection, each of which is provided on a plurality of supports on which a movable element is mounted; and a position detection unit (22) provided on a transport rail on which the fixture is mounted, the position detection magnet unit (12) having: a plurality of magnets (121) arranged such that different magnetic poles are alternately arranged in the transport direction of the support; and a side surface magnetic shielding part (122) provided at an end of the position detection magnet part (12) in the transport direction of the support, the position detection part (22) having: a process substrate (222) disposed parallel to the transport direction of the support, and a side surface magnetic shielding part (122) provided at the end of the position detection magnet part (12) in the transport direction of the support; a plurality of magnetic detection elements (221) arranged side by side in the transport direction of the support on the sur |
|---|