Universal wafer box carrying equipment

The invention discloses universal wafer box carrying equipment which comprises a rack, a wafer box positioning platform, a sealed cabin and a mechanical arm, the mechanical arm, the wafer box positioning platform and the sealed cabin are installed on the rack, and the mechanical arm is composed of a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HUANG XINGZHI, WEI RAN, HONG MINJUE, HU MINGANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses universal wafer box carrying equipment which comprises a rack, a wafer box positioning platform, a sealed cabin and a mechanical arm, the mechanical arm, the wafer box positioning platform and the sealed cabin are installed on the rack, and the mechanical arm is composed of a lifting mechanism, a transverse moving mechanism, a rotating mechanism and a clamping jaw mechanism; the sealed cabin is composed of a second air filtering unit, a sealed cabin box body, a box pressing mechanism, baffle connecting pieces and a lifting baffle, the second air filtering unit is locked below the sealed cabin box body and provides filtered air for the sealed cabin box body, the lifting baffle is connected with the sealed cabin box body through the two baffle connecting pieces, the stability of the lifting baffle is greatly improved, and the sealing cabin box body is convenient to use. And meanwhile, the dust generation phenomenon possibly generated by friction between the lifting baffle and a surroundi