Mask design layout fuzzy detection method, storage medium and graph repair equipment

The invention relates to the technical field of mask plate graph detection, in particular to a mask design layout fuzzy detection method, a storage medium and graph repair equipment. The method comprises the following steps: providing an initial mask design layout, and obtaining pattern point inform...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HE PING, RUAN WENSHENG, DING MING, ZHANG HONGRU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of mask plate graph detection, in particular to a mask design layout fuzzy detection method, a storage medium and graph repair equipment. The method comprises the following steps: providing an initial mask design layout, and obtaining pattern point information of the initial mask design layout; a preset dead pixel database is provided, the dead pixel graph is broken into a plurality of graphs composed of rectangles in the dead pixel database through design rule check, fuzzy classification is carried out on the dead pixel information, and the dead pixel information after fuzzy classification is obtained; and matching the pattern point information in the initial mask design layout with defective pixel information in a preset defective pixel database, and if the matching succeeds, judging that defective pixels exist in the initial mask design layout. According to the invention, the technical problems that the pattern in the mask usually has missing or a large amount o