HOLDING DEVICE, EXPOSURE DEVICE, AND METHOD FOR MANUFACTURING ARTICLE

The invention relates to a holding apparatus, an exposure apparatus, and a method of manufacturing an article. A holding device for holding an optical element having a flat surface on the outer periphery, the holding device comprising: a lens barrel having a contact surface that contacts the flat surface; a first elastic member that presses the optical element in the optical axis direction of the optical element; and a second elastic member that presses the flat surface against the contact surface. 本发明涉及保持装置、曝光装置以及物品的制造方法。一种保持装置，对在外周具有平面的光学元件进行保持，其中，该保持装置具有：镜筒，包括与所述平面抵接的抵接面；第1弹性构件，在所述光学元件的光轴方向上按压所述光学元件；以及第2弹性构件，将所述平面向所述抵接面按压。