Plasma gas temperature measuring device and method based on optical frequency domain reflection

The invention discloses a plasma gas temperature measuring device and method based on optical frequency domain reflection, and relates to the technical field of radio frequency plasma experiment diagnosis, the device comprises a vacuum chamber, an optical fiber temperature sensor, a quartz tube, a c...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LYU TUO, GAO FEI, LYU XIANGYUN, ZHOU DAPENG, WANG YOUNIAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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