Plasma gas temperature measuring device and method based on optical frequency domain reflection

The invention discloses a plasma gas temperature measuring device and method based on optical frequency domain reflection, and relates to the technical field of radio frequency plasma experiment diagnosis, the device comprises a vacuum chamber, an optical fiber temperature sensor, a quartz tube, a ceramic plate, an OFDR system and a computer; the ceramic plate is located on a substrate table of the vacuum chamber, the optical fiber temperature sensor is located on the ceramic plate and located in plasma of the vacuum chamber, one end of the quartz tube is located in the vacuum chamber, the optical fiber temperature sensor penetrates through the quartz tube to be connected with the OFDR system, and the OFDR system is further connected with the computer; the computer is used for controlling the OFDR system to emit frequency sweeping laser to the optical fiber temperature sensor, collecting and demodulating Rayleigh scattering light data carrying sensing information, and determining the temperature distribution