Terahertz Schottky diode chip and preparation method and test method thereof

The embodiment of the invention provides a terahertz Schottky diode chip and a preparation method and a test method thereof, and belongs to the technical field of terahertz chips. According to the terahertz Schottky diode chip, the suspended beam type lead with the groove is arranged on the side fac...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU BO, FENG ZHIHONG, YANG DABAO, XING DONG, ZHAO XIANGYANG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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