Semiconductor processing device

According to the semiconductor processing device provided by the invention, the reaction cavity and the cover body arranged at the opening of the reaction cavity are arranged, the cover body is taken out into a plurality of parts to form the supporting framework and the plurality of maintenance ports, the corresponding maintenance cover is arranged on each maintenance port, and the maintenance covers are directly and detachably connected with the supporting framework; when a certain area needs to be maintained, only the corresponding maintenance cover needs to be uncovered, the maintenance opening formed after the maintenance cover is detached serves as the maintenance area, the supporting framework serves as the supporting area, or the supporting framework and the maintenance cover which is not detached jointly form the supporting area, and a maintainer can kneel/sit/lie on the supporting area. The lifting tool is saved, the complexity of the design of the semiconductor processing device is reduced, the cost