Small-frequency-difference MEMS gyroscope detection phase shift suppression system

The invention discloses a small-frequency-difference MEMS gyroscope detection phase shift suppression system which is composed of an MEMS gyroscope, a driving loop, an angular velocity demodulation module and a parameter suppression loop. The key point of the invention lies in that by applying a par...

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Hauptverfasser: QIU ANPING, YANG XIANGLAN, XIA GUOMING, SHI QIN, HUANG JINYANG, ZHAO YANG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a small-frequency-difference MEMS gyroscope detection phase shift suppression system which is composed of an MEMS gyroscope, a driving loop, an angular velocity demodulation module and a parameter suppression loop. The key point of the invention lies in that by applying a parameter suppression signal to the detection resonator, electrostatic correction is carried out on the amplitude-phase-frequency response of the detection resonator, the detection phase shift in a small frequency difference mode is suppressed, and the impact resistance of the detection resonator is improved. A detection resonance loop is embedded in a parameter suppression loop to enable a detection resonator to generate fixed-amplitude self-excited oscillation, a band-pass phase shifter is used for generating a parameter suppression signal which is twice of the detection frequency from a detection amplitude multiplier, and the parameter suppression signal acts on a parameter suppression electrode after being subject