Consistent known volume liquid metal or metal alloy transfer from atmosphere to vacuum chamber

Methods and systems are provided for delivering molten metal and metal alloys in fixed volumes. The system includes an evaporation system having a fluid inlet port and a fluid delivery system. A fluid delivery system includes an ampoule operable to contain a source material. The ampoule includes a fluid outlet port and a gas inlet port. The fluid delivery system further includes a fluid delivery line operable to deliver the source material to the evaporation system. The fluid transfer line includes a first end fluidly coupled with the fluid outlet port and a second end fluidly coupled with the fluid inlet port. The fluid transfer line further includes a first isolation valve disposed along the fluid transfer line and a second isolation valve disposed along the fluid transfer line, the first isolation valve and the second isolation valve defining a fixed volume of the fluid transfer line. 提供了用于以固定体积输送熔融金属和金属合金的方法和系统。该系统包括具有流体入口端口的蒸发系统和流体输送系统。流体输送系统包括可操作以容纳源材料的安瓿。安瓿包括流体出口端口和气体入口端口。流体输送系统进一步包括流体输送管线，该流体输送管线可操作以将