Heterogeneous chip stacking equipment

The invention provides heterogeneous chip stacking equipment, which comprises a substrate bearing structure, a limiting substrate structure, a first cover plate structure, a second cover plate structure and a chip bearing structure, and is characterized in that the limiting substrate structure is detachably arranged on the substrate bearing structure, the first cover plate structure is detachably arranged above the limiting substrate structure, and the second cover plate structure is detachably arranged above the chip bearing structure; the second cover plate structure is detachably arranged on the first cover plate structure, the chip bearing structure is movably arranged above the substrate bearing structure, the limiting substrate structure is provided with a plurality of limiting grooves used for containing a plurality of first chips respectively, the first cover plate structure is configured to be arranged on the first chips and tightly press the first chips, and the first cover plate structure is config