Thin film plate capacitor and preparation method and application thereof

The invention belongs to the technical field of capacitors, and particularly relates to a thin film plate capacitor and a preparation method and application thereof. The thin film plate capacitor provided by the invention comprises a bottom electrode layer, a substrate layer, a lower electrode layer...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHAO WEILI, WANG SHUAI, DUAN CHENGHUI, XU YANCHU, DONG HEYU
Format: Patent
Sprache:chi ; eng
Schlagworte:
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