Mask plate assembly and evaporation device

The invention discloses a mask plate assembly and an evaporation device. The mask plate assembly comprises a supporting mask plate and a plurality of metal mask plates, the supporting mask plate comprises an outer frame with a hollow area in the middle, a plurality of first supporting plates which a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ZENG QIHAO, WANG YUZHAO, SHEN KUO, GUAN XINXING, LIU HAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The invention discloses a mask plate assembly and an evaporation device. The mask plate assembly comprises a supporting mask plate and a plurality of metal mask plates, the supporting mask plate comprises an outer frame with a hollow area in the middle, a plurality of first supporting plates which are arranged in the hollow area in a crossing mode in the first direction and arranged on the outer frame at intervals in the second direction, and a plurality of second supporting plates which are arranged in the hollow area in a crossing mode in the second direction and arranged on the outer frame at intervals in the first direction, and the first direction and the second direction intersect. The multiple metal mask plates are arranged in the hollow area in a striding mode in the first direction and arranged on the outer frame side by side in the second direction, the two sides, in the first direction, of the metal mask plates correspond to the outer frame and/or the first supporting plate, and the non-evaporation