Heterojunction silicon wafer carrying device and carrying method
The invention discloses a heterojunction silicon wafer carrying device and a carrying method. The carrying device comprises a carrying module, a limiting clamping module and a jacking module, the jacking module is arranged at the bottom of the limiting and clamping module, one end of the carrying mo...
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| creator | LI ZHI CHEN CHONG LUO CAIWEN LI XIANGHUI |
| description | The invention discloses a heterojunction silicon wafer carrying device and a carrying method. The carrying device comprises a carrying module, a limiting clamping module and a jacking module, the jacking module is arranged at the bottom of the limiting and clamping module, one end of the carrying module is connected to a positioning section of the heterojunction equipment, and the other end of the carrying module penetrates through the limiting and clamping module and is used for carrying a heterojunction silicon wafer in the X-axis direction; the limiting clamping module is used for carrying the heterojunction silicon wafer in the Y-axis direction, and the jacking module is used for driving the limiting clamping module to ascend and descend so as to carry the heterojunction silicon wafer in the Z-axis direction; the carrying module and the limiting clamping module are both provided with a plurality of limiting pieces so as to assist the heterojunction silicon wafer in positioning. An air floating assembly is |
| format | Patent |
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The carrying device comprises a carrying module, a limiting clamping module and a jacking module, the jacking module is arranged at the bottom of the limiting and clamping module, one end of the carrying module is connected to a positioning section of the heterojunction equipment, and the other end of the carrying module penetrates through the limiting and clamping module and is used for carrying a heterojunction silicon wafer in the X-axis direction; the limiting clamping module is used for carrying the heterojunction silicon wafer in the Y-axis direction, and the jacking module is used for driving the limiting clamping module to ascend and descend so as to carry the heterojunction silicon wafer in the Z-axis direction; the carrying module and the limiting clamping module are both provided with a plurality of limiting pieces so as to assist the heterojunction silicon wafer in positioning. 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The carrying device comprises a carrying module, a limiting clamping module and a jacking module, the jacking module is arranged at the bottom of the limiting and clamping module, one end of the carrying module is connected to a positioning section of the heterojunction equipment, and the other end of the carrying module penetrates through the limiting and clamping module and is used for carrying a heterojunction silicon wafer in the X-axis direction; the limiting clamping module is used for carrying the heterojunction silicon wafer in the Y-axis direction, and the jacking module is used for driving the limiting clamping module to ascend and descend so as to carry the heterojunction silicon wafer in the Z-axis direction; the carrying module and the limiting clamping module are both provided with a plurality of limiting pieces so as to assist the heterojunction silicon wafer in positioning. 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The carrying device comprises a carrying module, a limiting clamping module and a jacking module, the jacking module is arranged at the bottom of the limiting and clamping module, one end of the carrying module is connected to a positioning section of the heterojunction equipment, and the other end of the carrying module penetrates through the limiting and clamping module and is used for carrying a heterojunction silicon wafer in the X-axis direction; the limiting clamping module is used for carrying the heterojunction silicon wafer in the Y-axis direction, and the jacking module is used for driving the limiting clamping module to ascend and descend so as to carry the heterojunction silicon wafer in the Z-axis direction; the carrying module and the limiting clamping module are both provided with a plurality of limiting pieces so as to assist the heterojunction silicon wafer in positioning. An air floating assembly is</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Heterojunction silicon wafer carrying device and carrying method |
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