Heterojunction silicon wafer carrying device and carrying method

The invention discloses a heterojunction silicon wafer carrying device and a carrying method. The carrying device comprises a carrying module, a limiting clamping module and a jacking module, the jacking module is arranged at the bottom of the limiting and clamping module, one end of the carrying module is connected to a positioning section of the heterojunction equipment, and the other end of the carrying module penetrates through the limiting and clamping module and is used for carrying a heterojunction silicon wafer in the X-axis direction; the limiting clamping module is used for carrying the heterojunction silicon wafer in the Y-axis direction, and the jacking module is used for driving the limiting clamping module to ascend and descend so as to carry the heterojunction silicon wafer in the Z-axis direction; the carrying module and the limiting clamping module are both provided with a plurality of limiting pieces so as to assist the heterojunction silicon wafer in positioning. An air floating assembly is