Wafer regular addressing and receiving device

The invention relates to a wafer regular addressing and receiving device which comprises a wafer addressing and receiving assembly, and the wafer addressing and receiving assembly comprises a wafer addressing supporting frame, a wafer addressing moving plate, a wafer addressing servo motor, a materi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG QIANBAO, ZHAO YUXING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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