Method for detecting die bonding state by using airflow

The invention provides a method for detecting a die bonding state by utilizing air flow. The method comprises the following steps of: separating a local block of a crystal grain from a die bonding device and contacting a substrate to form a bonding wave; the bonding wave diffuses from a local block...

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1. Verfasser: LU YANHAO
Format: Patent
Sprache:chi ; eng
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