Capacitance piezoelectric hybrid flexible multi-mode sensor and preparation method thereof

The invention discloses a capacitive piezoelectric hybrid flexible multi-mode sensor and a preparation method thereof. The sensor comprises an output interface circuit board, a packaging cover plate, a conductive fabric electrode, a composite material sponge, a piezoelectric electrode and a PET film which are sequentially arranged from bottom to top, wherein the composite material sponge is placed between the conductive fabric electrode and the piezoelectric electrode. The sensor is made of flexible materials and can adapt to different surface shapes, the contact relation between the sensor and a measured object is improved through the rigid boundary of the surface, and interference signals generated by the sensor are reduced. The sensor can measure displacement deformation, pressure, vibration and human body approaching signals at the same time, and the accuracy of a measurement result is ensured by utilizing capacitance and piezoelectric mixed detection, so that the reliability of data analysis and applicat