Zone-melting purification process of silicon material

The invention discloses a zone-melting purification process of a silicon material, which is characterized by comprising the following steps of: placing a material to be purified in a to-be-heated area by using a zone-melting furnace, enabling the material to pass through the heating area from top to...

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Bibliographische Detailangaben
Hauptverfasser: FENG SHAO, YANG PING, ZHANG ZHONGHUA, LING JIBEI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a zone-melting purification process of a silicon material, which is characterized by comprising the following steps of: placing a material to be purified in a to-be-heated area by using a zone-melting furnace, enabling the material to pass through the heating area from top to bottom, introducing a protective atmosphere into the zone-melting furnace or vacuumizing the zone-melting furnace, in the moving process of the material rod from top to bottom, the heated part is subjected to melting and crystallizing processes, so that the polycrystalline rod is formed, and the visibility of a zone melting solution, the height of the zone melting liquid level and the thickness of solids of the zone melting part need to be controlled during downward pulling. Compared with the prior art, the zone-melting purification process for the silicon material has the advantage that the zone-melting purification process for the silicon material is combined with a directional solidification process on the basi