Film forming apparatus

The invention provides a film forming apparatus capable of efficiently heating a workpiece and forming a film. A film forming apparatus according to an embodiment includes: a chamber capable of having a vacuum inside; a rotating table which is provided in the chamber, holds a plurality of workpieces...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAKIZAWA YOJI, HIGUCHI KATSUTOSHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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