Tightening ring grabbing and positioning device and wafer processing equipment with same

Tightening ring grabbing and positioning device and wafer processing equipment with same

The invention discloses a tightening ring grabbing and positioning device and wafer processing equipment with the tightening ring grabbing and positioning device. The tightening ring grabbing and positioning device comprises a mounting plate; the multiple clamping jaw positioning mechanisms are arra...

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Hauptverfasser: YI FEIYUE, ZHANG WEIHAN, ZHANG BIAO, YANG SHUNKAI, LI JIDONG
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator YI FEIYUE
ZHANG WEIHAN
ZHANG BIAO
YANG SHUNKAI
LI JIDONG
description The invention discloses a tightening ring grabbing and positioning device and wafer processing equipment with the tightening ring grabbing and positioning device. The tightening ring grabbing and positioning device comprises a mounting plate; the multiple clamping jaw positioning mechanisms are arranged in the circumferential direction of the mounting plate at intervals, each clamping jaw positioning mechanism comprises a mounting base, a clamping jaw transmission assembly and a clamping tenon mechanism, the clamping jaw transmission assemblies and the clamping tenon mechanisms are mounted on the mounting bases, and the clamping tenon mechanisms are clamped to the clamping jaw transmission assemblies to limit rotation of the clamping jaw transmission assemblies; the clamping jaw transmission assembly moves along a straight line and pushes the mortise and tenon mechanism to move, and when the mortise and tenon mechanism moves to a preset position, the clamping jaw transmission assembly is not clamped any more,
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN117253834A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN117253834A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN117253834A3</originalsourceid><addsrcrecordid>eNrjZIgIyUzPKEnNy8xLVygCEelFiUlJIEZiXopCQX5xZklmPlg2JbUsMzkVLFyemJZapFBQlJ-cWlwMkkstLM0syE3NK1EozyzJUChOzE3lYWBNS8wpTuWF0twMim6uIc4euqkF-fGpxQWJyal5qSXxzn6GhuZGpsYWxiaOxsSoAQDTcTq1</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Tightening ring grabbing and positioning device and wafer processing equipment with same</title><source>esp@cenet</source><creator>YI FEIYUE ; ZHANG WEIHAN ; ZHANG BIAO ; YANG SHUNKAI ; LI JIDONG</creator><creatorcontrib>YI FEIYUE ; ZHANG WEIHAN ; ZHANG BIAO ; YANG SHUNKAI ; LI JIDONG</creatorcontrib><description>The invention discloses a tightening ring grabbing and positioning device and wafer processing equipment with the tightening ring grabbing and positioning device. The tightening ring grabbing and positioning device comprises a mounting plate; the multiple clamping jaw positioning mechanisms are arranged in the circumferential direction of the mounting plate at intervals, each clamping jaw positioning mechanism comprises a mounting base, a clamping jaw transmission assembly and a clamping tenon mechanism, the clamping jaw transmission assemblies and the clamping tenon mechanisms are mounted on the mounting bases, and the clamping tenon mechanisms are clamped to the clamping jaw transmission assemblies to limit rotation of the clamping jaw transmission assemblies; the clamping jaw transmission assembly moves along a straight line and pushes the mortise and tenon mechanism to move, and when the mortise and tenon mechanism moves to a preset position, the clamping jaw transmission assembly is not clamped any more,</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20231219&amp;DB=EPODOC&amp;CC=CN&amp;NR=117253834A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20231219&amp;DB=EPODOC&amp;CC=CN&amp;NR=117253834A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YI FEIYUE</creatorcontrib><creatorcontrib>ZHANG WEIHAN</creatorcontrib><creatorcontrib>ZHANG BIAO</creatorcontrib><creatorcontrib>YANG SHUNKAI</creatorcontrib><creatorcontrib>LI JIDONG</creatorcontrib><title>Tightening ring grabbing and positioning device and wafer processing equipment with same</title><description>The invention discloses a tightening ring grabbing and positioning device and wafer processing equipment with the tightening ring grabbing and positioning device. The tightening ring grabbing and positioning device comprises a mounting plate; the multiple clamping jaw positioning mechanisms are arranged in the circumferential direction of the mounting plate at intervals, each clamping jaw positioning mechanism comprises a mounting base, a clamping jaw transmission assembly and a clamping tenon mechanism, the clamping jaw transmission assemblies and the clamping tenon mechanisms are mounted on the mounting bases, and the clamping tenon mechanisms are clamped to the clamping jaw transmission assemblies to limit rotation of the clamping jaw transmission assemblies; the clamping jaw transmission assembly moves along a straight line and pushes the mortise and tenon mechanism to move, and when the mortise and tenon mechanism moves to a preset position, the clamping jaw transmission assembly is not clamped any more,</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZIgIyUzPKEnNy8xLVygCEelFiUlJIEZiXopCQX5xZklmPlg2JbUsMzkVLFyemJZapFBQlJ-cWlwMkkstLM0syE3NK1EozyzJUChOzE3lYWBNS8wpTuWF0twMim6uIc4euqkF-fGpxQWJyal5qSXxzn6GhuZGpsYWxiaOxsSoAQDTcTq1</recordid><startdate>20231219</startdate><enddate>20231219</enddate><creator>YI FEIYUE</creator><creator>ZHANG WEIHAN</creator><creator>ZHANG BIAO</creator><creator>YANG SHUNKAI</creator><creator>LI JIDONG</creator><scope>EVB</scope></search><sort><creationdate>20231219</creationdate><title>Tightening ring grabbing and positioning device and wafer processing equipment with same</title><author>YI FEIYUE ; ZHANG WEIHAN ; ZHANG BIAO ; YANG SHUNKAI ; LI JIDONG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN117253834A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>YI FEIYUE</creatorcontrib><creatorcontrib>ZHANG WEIHAN</creatorcontrib><creatorcontrib>ZHANG BIAO</creatorcontrib><creatorcontrib>YANG SHUNKAI</creatorcontrib><creatorcontrib>LI JIDONG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>YI FEIYUE</au><au>ZHANG WEIHAN</au><au>ZHANG BIAO</au><au>YANG SHUNKAI</au><au>LI JIDONG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Tightening ring grabbing and positioning device and wafer processing equipment with same</title><date>2023-12-19</date><risdate>2023</risdate><abstract>The invention discloses a tightening ring grabbing and positioning device and wafer processing equipment with the tightening ring grabbing and positioning device. The tightening ring grabbing and positioning device comprises a mounting plate; the multiple clamping jaw positioning mechanisms are arranged in the circumferential direction of the mounting plate at intervals, each clamping jaw positioning mechanism comprises a mounting base, a clamping jaw transmission assembly and a clamping tenon mechanism, the clamping jaw transmission assemblies and the clamping tenon mechanisms are mounted on the mounting bases, and the clamping tenon mechanisms are clamped to the clamping jaw transmission assemblies to limit rotation of the clamping jaw transmission assemblies; the clamping jaw transmission assembly moves along a straight line and pushes the mortise and tenon mechanism to move, and when the mortise and tenon mechanism moves to a preset position, the clamping jaw transmission assembly is not clamped any more,</abstract><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Tightening ring grabbing and positioning device and wafer processing equipment with same
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-07T00%3A14%3A28IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=YI%20FEIYUE&rft.date=2023-12-19&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN117253834A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true