Method of manufacturing microelement

A method of manufacturing a micro component includes: preparing a gallium nitride-based epitaxial structure including a p-type gallium nitride layer, an n-type gallium nitride layer on the p-type gallium nitride layer, and an undoped gallium nitride layer on the n-type gallium nitride layer; forming...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LYU XIAOFU, CHEN LI-YI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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