PROBE DEVICE, PROBE SYSTEM INCLUDING THE SAME, AND METHOD OF OPERATING THE SAME

The invention provides a probe device, a probe system including the probe device, and a method of operating the probe system. The operation method comprises the following steps of: approaching the probe device to a reference area; stopping the probe device when a first pin in a sensing module of the probe device is in contact with the reference area; rotating the probe device and enabling the probe device to be close to the reference area; and stopping the probe device when both the first pin and the second pin in the sensing module of the probe device contact the reference area. 本发明提供一种探针装置、包括该探针装置的探针系统及其操作方法。该操作方法包括：让该探针装置靠近一参考区域；当该探针装置的感测模块中第一针脚接触该参考区域时，停止该探针装置；旋转该探针装置并让该探针装置靠近该参考区域；以及当该探针装置的感测模块中该第一针脚和第二针脚都接触该参考区域时，停止该探针装置。