Target material conveying system component and manufacturing method thereof

Components of a target delivery system for a laser-generated plasma radiation source and methods of making such components are disclosed. Components, which may be, for example, a target transmission line, a freeze valve or a flow restrictor, or some combination of such functions, are made of glass capillary bodies that are sealed at both ends thereof to respective metal fittings using glass-metal seals. The method of manufacture involves heating the ends of the glass capillaries and then forming them to conform to the internal profile of the respective channel in each metal fitting and forming the glass-metal seal using the internal profile of the respective channel in each metal fitting. 公开了用于激光产生的等离子体辐射源的靶材传输系统的部件和制造这样的部件的方法。可以是例如靶材传输线、冻结阀或限流器或该功能的某种组合的部件由玻璃毛细管体制成，玻璃毛细管体在其两个端部处使用玻璃-金属密封件密封到相应的金属配件。制造方法涉及加热玻璃毛细管的端部，并且然后将它们形成为符合每个金属配件中的相应通道的内部轮廓并利用每个金属配件中的相应通道的内部轮廓，形成玻璃-金属密封件。