Method for measuring conductance characteristic of foil

The invention provides a method for measuring the conductivity characteristic of a foil, and relates to the technical field of electronic engineering, semiconductor engineering and material engineering, and the method comprises the steps: obtaining a to-be-measured target foil, and recognizing the f...

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Bibliographische Detailangaben
Hauptverfasser: WANG YALUN, YANG WEISAN, CHEN QIANG, PEI ZHONGZHENG, LI MINGGAO, ZHANG XIAOHUI, LIANG JUNCAI, LIU BAISHAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a method for measuring the conductivity characteristic of a foil, and relates to the technical field of electronic engineering, semiconductor engineering and material engineering, and the method comprises the steps: obtaining a to-be-measured target foil, and recognizing the first size of the target foil; according to the first size and a second size of each insulating substrate, a measurement carrier is selected from the insulating substrates, and the second size of the measurement carrier is smaller than the first size; the target foil is attached to the surface of the measurement carrier, so that the target foil wraps the measurement carrier, and a measurement sample is obtained; and based on a two-dimensional plane approximation model, conducting conductivity measurement on the measurement sample to obtain the conductivity characteristic of the target foil. The device can accurately measure the conductivity characteristic of the foil, and is widely applicable to foils of different m