Semiconductor liquid supply equipment and liquid supply method

The invention relates to semiconductor liquid supply equipment which is characterized in that at least three liquid storage tanks are arranged, the at least three liquid storage tanks circulate among a liquid supplementing area, a liquid supply area and an empty tank area which are arranged in the circumferential direction, a liquid supplementing mechanism in butt joint with the liquid storage tanks is arranged in the liquid supplementing area, liquid supplementing is conducted on the liquid storage tanks through a liquid supplementing assembly, and the liquid storage tanks are washed through a washing assembly; the liquid storage tanks in the empty tank area are communicated through the pipeline switching assembly between the liquid storage tanks for synchronous flushing, the liquid storage tanks can be cleaned while liquid is supplied uninterruptedly, corrosive cleaning liquid is prevented from corroding the inner walls of the liquid storage tanks, and therefore liquid leakage accidents can be prevented. 本申