Mini LED substrate plasma cleaning equipment and cleaning method

The invention discloses a Mini LED substrate plasma cleaning device and a cleaning method, and relates to the technical field of Mini LED substrate cleaning, the Mini LED substrate plasma cleaning device comprises a conveying assembly used for conveying a substrate, the conveying assembly automatically clamps the substrate and drives the substrate to conduct different types of cleaning, the stability of the substrate is guaranteed, the substrate is prevented from falling off in the cleaning process, and damage to the substrate is avoided; a cleaning assembly for conducting plasma cleaning on the substrate is arranged in the conveying assembly, the substrate is conveyed into the wiping assembly after plasma cleaning is conducted on the substrate, the wiping assembly wipes impurities left on the substrate, the conveying assembly continues to convey the substrate into the flushing assembly, and the flushing assembly flushes the surface of the substrate. According to the invention, the cleaning efficiency of the