TRANSMISSION DEVICE AND SEMICONDUCTOR DEVICE

The invention discloses a transmission device which comprises a bearing part used for bearing a base material; the transmission part is used for moving the bearing part, and the transmission part is movably connected with the bearing part; the positioning part is arranged on the bearing part, the po...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN MENGLAI, ZHANG FUPING, ZHANG MOU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a transmission device which comprises a bearing part used for bearing a base material; the transmission part is used for moving the bearing part, and the transmission part is movably connected with the bearing part; the positioning part is arranged on the bearing part, the positioning part is used for being matched with the positioning structure to fix the bearing part at a target position, and the transmission part can drive the bearing part to drive the positioning part to move towards the positioning structure in the first direction so that the positioning part and the positioning structure can be fixed at the target position; the bearing part generates displacement along a second direction relative to the transmission part before moving to the target position, and the first direction is different from the second direction. The invention further discloses semiconductor equipment which comprises the cavity, the positioning structure and the transmission device. According to the trans