Diaphragm adjusting system and semiconductor detection equipment

The invention provides a diaphragm adjusting system and a semiconductor detection device. The diaphragm adjusting system comprises a diaphragm integration module, a traction assembly and a driving mechanism. The diaphragm integration module is used for being arranged in a light path; the driving mec...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ZHU CHANGXING, BAI LIYUAN, MA LIANGQI, ZHAO WENBIN, JIANG JIANJUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SEMICONDUCTOR DEVICES TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	The invention provides a diaphragm adjusting system and a semiconductor detection device. The diaphragm adjusting system comprises a diaphragm integration module, a traction assembly and a driving mechanism. The diaphragm integration module is used for being arranged in a light path; the driving mechanism is arranged on one side of the diaphragm integration module to be far away from the light path, and the traction assembly is connected to the diaphragm integration module and the driving mechanism; the driving mechanism is arranged to drive the corresponding part of the diaphragm integration module to move through the traction assembly, so that a corresponding light blocking pattern is formed in the diaphragm integration module. A diaphragm integration module capable of forming a light blocking pattern is arranged in a light path, and a driving mechanism is arranged on one side of the diaphragm integration module and is far away from the light path, so that the driving mechanism is prevented from influencing